Tailoring Surface Properties of ArF Resists with Functionally Graded Materials (FGM)
نویسندگان
چکیده
منابع مشابه
Disk Vibration Analysis of Functionally Graded Materials
Perforated discs have many applications in different parts of industry. By making such disks of functionally graded materials, more capabilities can be obtained from them. Vibration analysis of these kinds of disks can help us make them more efficient. In this paper, modeling and evaluation of disk vibration of functionally graded materials with regard to thickness were carried out using Abaqus...
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ژورنال
عنوان ژورنال: Journal of Photopolymer Science and Technology
سال: 2007
ISSN: 0914-9244,1349-6336
DOI: 10.2494/photopolymer.20.473